455 lines
42 KiB
HTML
455 lines
42 KiB
HTML
<!DOCTYPE html>
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<html lang="zh-CN" data-theme="synthwave">
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<head>
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<meta charset="UTF-8">
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<meta name="viewport" content="width=device-width, initial-scale=1.0">
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<title>深度研报：光刻机宇量昇</title>
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<style>
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@import url('https://fonts.googleapis.com/css2?family=Noto+Sans+SC:wght@300;400;500;700&display=swap');
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body {
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font-family: 'Noto Sans SC', sans-serif;
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background-color: #1a103c;
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background-image:
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radial-gradient(ellipse 20% 40% at 20% 20%, rgba(121, 74, 213, 0.3), transparent),
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background-attachment: fixed;
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}
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.glass-card {
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background: rgba(29, 29, 58, 0.4);
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backdrop-filter: blur(20px);
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-webkit-backdrop-filter: blur(20px);
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border: 1px solid rgba(255, 255, 255, 0.1);
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box-shadow: 0 8px 32px 0 rgba(0, 0, 0, 0.37);
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}
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text-shadow: 0 0 5px rgba(59, 130, 246, 0.8), 0 0 10px rgba(59, 130, 246, 0.6);
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border: 1px solid;
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border-image-source: linear-gradient(to right, #794ad5, #23a9f0);
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}
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.bento-grid {
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display: grid;
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gap: 1rem;
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grid-template-columns: repeat(auto-fit, minmax(300px, 1fr));
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}
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</style>
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</head>
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<body class="min-h-screen p-4 sm:p-6 lg:p-8">
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<div class="max-w-7xl mx-auto space-y-8">
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<!-- Header -->
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<header class="text-center p-6 rounded-3xl glass-card">
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<h1 class="text-4xl md:text-5xl font-bold fui-title mb-2">概念深度研报：光刻机宇量昇</h1>
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<p class="text-neutral-content">北京价值前沿科技有限公司 AI投研agent：“价小前投研”</p>
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</header>
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<!-- Core Insight Section -->
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<main class="space-y-8">
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<div class="p-6 rounded-3xl glass-card space-y-6">
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<h2 class="text-3xl font-bold fui-header">核心洞察 (Core Insight)</h2>
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<!-- 0. Concept Event -->
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<div class="p-4 rounded-2xl glass-card border border-primary/20">
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<h3 class="text-xl font-semibold mb-4 text-primary">0. 概念事件与时间轴</h3>
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<div id="timeline-chart" style="width: 100%; height: 400px;"></div>
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<div class="text-sm mt-4 p-4 bg-base-100/30 rounded-lg">
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<p><strong class="text-secondary">核心事件:</strong> 2025年9月17日，市场引爆。英国《金融时报》及《上海证券报》报道，中芯国际（SMIC）正在测试由上海初创公司 <strong class="text-accent">宇量昇（Unilux）</strong> 制造的国产浸没式深紫外（DUV）光刻机。该设备为 <strong class="text-accent">28nm</strong> 级别，计划采用“多重曝光技术”生产 <strong class="text-accent">7nm</strong> 芯片，试验初步结果“令人鼓舞”。</p>
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<p><strong class="text-secondary">背景:</strong> 在美国持续收紧高端DUV光刻机出口的背景下，国产替代成为国家战略的重中之重。宇量昇的出现打破了上海微电子（SMEE）作为单一破局者的市场认知。</p>
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<p><strong class="text-secondary">前序事件:</strong> 2024年12月3日，宇量昇被美国列入实体清单，已从侧面印证其技术潜力和战略地位。</p>
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</div>
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</div>
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<!-- 1 & 2. Summary & Core Logic in Bento Grid -->
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<div class="grid grid-cols-1 lg:grid-cols-2 gap-6">
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<div class="p-4 rounded-2xl glass-card border border-secondary/20 lg:col-span-1">
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<h3 class="text-xl font-semibold mb-4 text-secondary">1. 核心观点摘要</h3>
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<p class="text-base-content">“光刻机宇量昇”概念标志着中国高端光刻设备从“单一玩家”向“多点突破”演进的关键转折。其核心驱动力源于地缘政治压力下的国家战略意志与产业链技术积累的共振。当前概念处于<strong class="text-warning">“0到1”技术验证阶段</strong>，市场情绪已大幅领先于商业化量产的实际进程，存在显著的<strong class="text-error">预期差</strong>。</p>
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</div>
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<div class="p-4 rounded-2xl glass-card border border-accent/20 lg:col-span-1">
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<h3 class="text-xl font-semibold mb-4 text-accent">2. 核心逻辑与市场认知分析</h3>
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<ul class="list-disc list-inside space-y-2 text-base-content">
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<li><strong class="text-info">“国家意志”下的破局者叙事:</strong> 宇量昇的突破被市场解读为国产化生态走向成熟的标志，打破了SMEE单一路线的认知。</li>
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<li><strong class="text-info">市场情绪高度乐观:</strong> 由国际顶级媒体引爆，券商迅速跟进，市场进入“宁可买错，不可错过”的狂热阶段。</li>
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<li><strong class="text-info">预期差与认知偏差:</strong>
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<ul class="list-disc list-inside ml-4 mt-1 text-sm">
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<li><strong class="text-warning">“7nm光刻机”认知偏差:</strong> 事实是28nm光刻机 + 多重曝光<strong class="text-error">(成本高、良率低)</strong>来尝试7nm工艺，并非原生7nm设备。</li>
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<li><strong class="text-warning">“测试成功”认知偏差:</strong> 事实是“初步结果令人鼓舞”，距离大规模量产至少有2-3年磨合期。</li>
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<li><strong class="text-error">信息混淆风险:</strong> 市场易将光刻机“宇量昇”与华为AI芯片“昇腾”混淆。</li>
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</ul>
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</li>
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</ul>
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</div>
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</div>
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<!-- 3 & 4. Catalysts & Industry Chain -->
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<div class="grid grid-cols-1 lg:grid-cols-2 gap-6">
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<div class="p-4 rounded-2xl glass-card border border-info/20">
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<h3 class="text-xl font-semibold mb-4 text-info">3. 关键催化剂与未来发展路径</h3>
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<h4 class="font-semibold text-success mb-2">近期催化剂 (3-6个月)</h4>
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<ul class="list-decimal list-inside space-y-1 text-sm">
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<li>中芯或宇量昇官方发布验证的阶段性成果 (套刻精度, 产能, 良率)。</li>
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<li>获得首台商业化生产订单。</li>
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<li>核心供应商 (如波长光电、美利信) 财报确认收入。</li>
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<li>同类公司 (如新凯来) 技术进展披露。</li>
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</ul>
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<div class="divider divider-info"></div>
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<h4 class="font-semibold text-success mb-2">长期发展路径</h4>
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<ul class="timeline timeline-compact timeline-vertical">
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<li>
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<div class="timeline-start timeline-box">单点验证期 (当前)</div>
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<div class="timeline-middle"><svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 20 20" fill="currentColor" class="w-5 h-5 text-primary"><path fill-rule="evenodd" d="M10 18a8 8 0 100-16 8 8 0 000 16zm3.857-9.809a.75.75 0 00-1.214-.882l-3.483 4.79-1.88-1.88a.75.75 0 10-1.06 1.061l2.5 2.5a.75.75 0 001.137-.089l4-5.5z" clip-rule="evenodd" /></svg></div>
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<hr class="bg-primary"/>
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</li>
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<li>
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<hr class="bg-primary"/>
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<div class="timeline-middle"><svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 20 20" fill="currentColor" class="w-5 h-5 text-secondary"><path fill-rule="evenodd" d="M10 18a8 8 0 100-16 8 8 0 000 16zm3.857-9.809a.75.75 0 00-1.214-.882l-3.483 4.79-1.88-1.88a.75.75 0 10-1.06 1.061l2.5 2.5a.75.75 0 001.137-.089l4-5.5z" clip-rule="evenodd" /></svg></div>
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<div class="timeline-end timeline-box">小批量产与生态构建期 (2-3年)</div>
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<hr class="bg-secondary"/>
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</li>
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<li>
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<hr class="bg-secondary"/>
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<div class="timeline-start timeline-box">规模化替代期 (3-5年)</div>
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<div class="timeline-middle"><svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 20 20" fill="currentColor" class="w-5 h-5 text-accent"><path fill-rule="evenodd" d="M10 18a8 8 0 100-16 8 8 0 000 16zm3.857-9.809a.75.75 0 00-1.214-.882l-3.483 4.79-1.88-1.88a.75.75 0 10-1.06 1.061l2.5 2.5a.75.75 0 001.137-.089l4-5.5z" clip-rule="evenodd" /></svg></div>
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</li>
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</ul>
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</div>
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<div class="p-4 rounded-2xl glass-card border border-success/20">
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<h3 class="text-xl font-semibold mb-4 text-success">4. 产业链与核心公司剖析</h3>
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<p class="text-sm text-base-content mb-4">产业链分为上游核心零部件、中游整机集成、下游晶圆制造。核心投资逻辑在于上游零部件的国产替代。</p>
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<div class="overflow-x-auto">
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<table class="table table-sm">
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<thead>
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<tr>
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<th>核心玩家</th>
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<th>角色定位</th>
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<th>优势/风险</th>
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<th class="text-center">逻辑纯粹度</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td><div class="font-bold">宇量昇</div></td>
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<td>颠覆者 (Disruptor)</td>
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<td><span class="text-success">优势:</span> 路径激进，率先验证。<br/><span class="text-error">风险:</span> 技术稳定性未知，实体清单。</td>
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<td class="text-center"><div class="radial-progress text-primary" style="--value:100; --size:3rem;">100%</div></td>
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</tr>
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<tr>
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<td><div class="font-bold">上海微电子</div></td>
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<td> incumbent (守成者)</td>
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<td><span class="text-success">优势:</span> 国家支持，体系完整。<br/><span class="text-error">风险:</span> 市场化进程相对较慢。</td>
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<td class="text-center"><div class="radial-progress text-primary" style="--value:90; --size:3rem;">90%</div></td>
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</tr>
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<tr>
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<td><div class="font-bold">波长光电</div></td>
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<td>黄金供应商 (Golden Supplier)</td>
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<td><span class="text-success">优势:</span> 独家覆盖三家整机厂，风险分散。<br/><span class="text-error">风险:</span> 供应非核心物镜，价值量待考。</td>
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<td class="text-center"><div class="radial-progress text-primary" style="--value:100; --size:3rem;">100%</div></td>
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</tr>
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<tr>
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<td><div class="font-bold">美利信</div></td>
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<td>直接受益者 (Direct Beneficiary)</td>
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<td><span class="text-success">优势:</span> 供应核心结构件，关联直接。<br/><span class="text-error">风险:</span> 与宇量昇高度绑定，风险集中。</td>
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<td class="text-center"><div class="radial-progress text-secondary" style="--value:85; --size:3rem;">85%</div></td>
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</tr>
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</tbody>
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</table>
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</div>
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<div class="mt-4 p-2 bg-error/20 rounded-lg text-sm">
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<strong class="text-error">待验证高风险信息：</strong>研报数据存在矛盾，舜宇光学科技的角色不明（一份研报称其光刻机业务大增，但无其他佐证），需谨慎对待。
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</div>
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</div>
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</div>
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<!-- 5 & 6. Risks & Conclusion -->
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<div class="grid grid-cols-1 lg:grid-cols-2 gap-6">
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<div class="p-4 rounded-2xl glass-card border border-warning/20">
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<h3 class="text-xl font-semibold mb-4 text-warning">5. 潜在风险与挑战</h3>
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<ul class="list-disc list-inside space-y-2 text-sm text-base-content">
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<li><strong>技术风险:</strong> 良率与稳定性是最大挑战；多重曝光的商业经济性存疑。</li>
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<li><strong>商业化风险:</strong> 国产设备产能(Throughput)若远低于进口设备，将影响晶圆厂采购意愿。</li>
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<li><strong>生态风险:</strong> 光刻是系统工程，依赖光刻胶、检测等全产业链协同。</li>
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<li><strong>政策风险:</strong> 美国可能进一步加剧对核心零部件、软件的制裁。</li>
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<li><strong>信息风险:</strong> 市场信息复杂，存在宇量昇/昇腾混淆、舜宇光学角色不明等失真风险。</li>
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</ul>
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</div>
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<div class="p-4 rounded-2xl glass-card border border-fuchsia-500/20">
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<h3 class="text-xl font-semibold mb-4 text-fuchsia-400">6. 综合结论与投资启示</h3>
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<p class="mb-4 text-base-content"><strong>结论:</strong> 概念处于<strong class="text-accent">事件驱动下的主题炒作阶段</strong>，尚未进入基本面驱动阶段。市场对技术和商业化难度认知不足，存在回调风险。</p>
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<h4 class="font-semibold text-info mb-2">最具投资价值的细分环节：</h4>
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<ol class="list-decimal list-inside space-y-2 text-sm">
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<li><strong class="text-success">平台型核心零部件供应商(“卖铲人”策略):</strong> 确定性与成长性平衡最佳。关注同时为多家整机厂供货、具核心壁垒的公司。
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<div class="badge badge-primary badge-outline ml-2">波长光电</div>
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<div class="badge badge-secondary badge-outline ml-2">茂莱光学</div>
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<div class="badge badge-accent badge-outline ml-2">福晶科技</div>
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</li>
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<li><strong class="text-warning">与破局者深度绑定的独家供应商:</strong> 业绩弹性最大，但风险也最高，适合风险偏好高的投资者。
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<div class="badge badge-error badge-outline ml-2">美利信</div>
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</li>
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</ol>
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</div>
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</div>
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</div>
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<!-- Key Data Points Section -->
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<div x-data="{ tab: 'news' }" class="p-6 rounded-3xl glass-card">
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<h2 class="text-3xl font-bold fui-header mb-4">关键数据佐证 (Key Data Points)</h2>
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<div class="tabs tabs-boxed bg-base-100/30">
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<a class="tab" :class="{'tab-active': tab === 'news'}" @click.prevent="tab = 'news'">新闻纪要</a>
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<a class="tab" :class="{'tab-active': tab === 'roadshow'}" @click.prevent="tab = 'roadshow'">路演精粹</a>
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<a class="tab" :class="{'tab-active': tab === 'research'}" @click.prevent="tab = 'research'">研报提炼</a>
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</div>
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<div class="p-4 mt-4 rounded-box bg-base-100/20 min-h-[300px]">
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<div x-show="tab === 'news'">
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<h3 class="text-lg font-bold mb-2">新闻数据摘要</h3>
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<ul class="list-disc space-y-2 pl-5 text-sm">
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<li><strong>核心事件：宇量昇光刻机进入中芯国际测试</strong>
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<ul class="list-circle space-y-1 pl-5 text-xs text-neutral-content">
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<li>多家媒体报道（上证报、金融时报等），中芯国际正在测试宇量昇制造的浸没式DUV光刻机。</li>
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<li>技术应用：采用“多重曝光技术”生产7纳米芯片。</li>
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</ul>
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</li>
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<li><strong>设备详情与进展</strong>
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<ul class="list-circle space-y-1 pl-5 text-xs text-neutral-content">
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<li>设备类型：浸没式技术，规格为国产28纳米深紫外光刻机。</li>
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<li>测试状态：初步结果“令人鼓舞”，但尚不清楚何时能用于大规模生产。</li>
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</ul>
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</li>
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<li><strong>供应链与合作关系</strong>
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<ul class="list-circle space-y-1 pl-5 text-xs text-neutral-content">
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<li><strong>波长光电</strong>被确认为国内唯一覆盖宇量昇、新凯来、上海微电子三大光刻机厂商的光学元件供应商。</li>
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<li>宇量昇被列入实体清单，与其合作的还有新凯来等厂商。</li>
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</ul>
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</li>
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</ul>
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</div>
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<div x-show="tab === 'roadshow'">
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<h3 class="text-lg font-bold mb-2">路演数据精粹</h3>
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<ul class="list-disc space-y-2 pl-5 text-sm">
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<li><strong>技术核心：</strong>光刻机价值占前道设备20-30%，技术演进遵循瑞利准则（CD = K₁·λ/NA），通过缩短波长 (λ) 或提升数值孔径 (NA) 来提高分辨率。</li>
|
||
<li><strong>五大核心模块：</strong>光学模块、运动控制模块、测量模块、传输模块、环境控制模块。光学系统和工件台是价值量最高、技术壁垒最强的部分。</li>
|
||
<li><strong>国内现状：</strong>国产化率整体 < 5%，上海微电子（SMEE）的28nm浸没式光刻机是当前最高水平，但面临良率与稳定性挑战。</li>
|
||
<li><strong>核心零部件厂商梳理：</strong>
|
||
<ul class="list-circle space-y-1 pl-5 text-xs text-neutral-content">
|
||
<li>光源：科益虹源（激光器），福晶科技（EUV激光晶体）。</li>
|
||
<li>光学系统：茂莱光学（物镜/照明）、福光股份（镜头）、波长光电（镜片）。</li>
|
||
<li>工件台：华卓精科（双工件台），苏大维格（光栅尺）。</li>
|
||
<li>配套：新莱应材（真空阀门），美埃科技（洁净设备），同飞股份（温控）。</li>
|
||
</ul>
|
||
</li>
|
||
<li><strong class="text-error">注意：</strong>路演数据中提及的“昇腾”是指华为AI芯片，并非“宇量昇”。</li>
|
||
</ul>
|
||
</div>
|
||
<div x-show="tab === 'research'">
|
||
<h3 class="text-lg font-bold mb-2">研报数据提炼</h3>
|
||
<ul class="list-disc space-y-2 pl-5 text-sm">
|
||
<li><strong>行业分析：</strong>研报详细拆解了65nm ArF光刻机技术参数，并与ASML、Nikon进行对比，强调套刻精度是核心指标。列出了光刻机产业链的“卡脖子”环节及相关上市公司。</li>
|
||
<li><strong class="text-error">信息矛盾点 - 舜宇光学科技：</strong>一份研报（2024-07-11）明确指出其“其他光电产品”（主要为光刻机及配套设备）出货量同比大增205.4%，成为新增长引擎。然而，其他多份关于舜宇的研报及所有路演、新闻数据均未提及此业务，构成重大信息疑点。</li>
|
||
<li><strong>潜在关联挖掘：</strong>部分研报从技术储备角度分析了其他公司的潜在关联性，如海昇药业的化学合成技术与光刻胶材料的技术共通性，但均无直接业务关联。</li>
|
||
</ul>
|
||
</div>
|
||
</div>
|
||
</div>
|
||
|
||
<!-- Market Reaction -->
|
||
<div class="p-6 rounded-3xl glass-card">
|
||
<h2 class="text-3xl font-bold fui-header mb-4">市场反应分析 (Market Reaction)</h2>
|
||
<div class="grid grid-cols-1 md:grid-cols-2 xl:grid-cols-4 gap-4">
|
||
<!-- Rise Analysis Cards will be injected here -->
|
||
<div class="card glass-card">
|
||
<div class="card-body">
|
||
<h2 class="card-title">阿石创(300706) <span class="badge badge-success">+5.47%</span></h2>
|
||
<p class="text-sm text-neutral-content">2025-09-17</p>
|
||
<p class="text-xs">被中泰电子研报明确列为“光刻机弹性新票”，直接受益于宇量昇事件催化，叠加半导体设备板块整体走强。</p>
|
||
</div>
|
||
</div>
|
||
<div class="card glass-card">
|
||
<div class="card-body">
|
||
<h2 class="card-title">汇成股份(688403) <span class="badge badge-success">+14.16%</span></h2>
|
||
<p class="text-sm text-neutral-content">2025-09-18</p>
|
||
<p class="text-xs">受半导体产业链集体拉升及光刻机概念驱动。同时，与“汇成真空”名称相似，可能受其利好消息产生关联提振效应。</p>
|
||
</div>
|
||
</div>
|
||
<div class="card glass-card">
|
||
<div class="card-body">
|
||
<h2 class="card-title">英诺激光(301021) <span class="badge badge-success">+6.26%</span></h2>
|
||
<p class="text-sm text-neutral-content">2025-07-25</p>
|
||
<p class="text-xs">核心催化剂为公司在DUV和EUV光源领域的商业化突破，作为上海微电子光源系统合作伙伴，技术稀缺性高。</p>
|
||
</div>
|
||
</div>
|
||
<div class="card glass-card">
|
||
<div class="card-body">
|
||
<h2 class="card-title">利和兴(301013) <span class="badge badge-success">+20.01%</span></h2>
|
||
<p class="text-sm text-neutral-content">2025-10-13</p>
|
||
<p class="text-xs">因成为另一光刻机新势力“新凯来”的5nm光刻机检测设备唯一合格供应商，在湾芯展前被资金卡位炒作。</p>
|
||
</div>
|
||
</div>
|
||
</div>
|
||
</div>
|
||
|
||
<!-- Stock Table -->
|
||
<div class="p-6 rounded-3xl glass-card">
|
||
<h2 class="text-3xl font-bold fui-header mb-4">概念相关标的 (Related Stocks)</h2>
|
||
<div class="overflow-x-auto">
|
||
<table class="table table-zebra w-full">
|
||
<thead>
|
||
<tr class="text-base text-secondary">
|
||
<th>股票名称</th>
|
||
<th>代码</th>
|
||
<th>关联原因</th>
|
||
<th>标签</th>
|
||
</tr>
|
||
</thead>
|
||
<tbody>
|
||
<!-- Table rows will be injected here -->
|
||
<tr><td>张江高科</td><td><a href="https://valuefrontier.cn/company?scode=600895" target="_blank" class="link link-hover link-primary">600895</a></td><td>间接持股上海微电子10.779%的股份</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>东方明珠</td><td><a href="https://valuefrontier.cn/company?scode=600637" target="_blank" class="link link-hover link-primary">600637</a></td><td>间接持股上海微电子1.73%的股份</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>上海电气</td><td><a href="https://valuefrontier.cn/company?scode=601727" target="_blank" class="link link-hover link-primary">601727</a></td><td>上海电气控股集团持股公司股份比例第一，41.09%；上海电气控股集团为上海微电子第一大股东直接持股32.08%</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>电气风电</td><td><a href="https://valuefrontier.cn/company?scode=688660" target="_blank" class="link link-hover link-primary">688660</a></td><td>上海电气控股集团持股公司股份比例第二，26.94%；同上</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>海立股份</td><td><a href="https://valuefrontier.cn/company?scode=600619" target="_blank" class="link link-hover link-primary">600619</a></td><td>上海电气控股集团持股公司股份比例第三，26.41%；同上</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>上海机电</td><td><a href="https://valuefrontier.cn/company?scode=600835" target="_blank" class="link link-hover link-primary">600835</a></td><td>上海电气控股集团持股公司股份比例第四，19.73%；同上</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>赢合科技</td><td><a href="https://valuefrontier.cn/company?scode=300457" target="_blank" class="link link-hover link-primary">300457</a></td><td>上海电气控股集团持股公司股份比例第五，11.67%；同上</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">上海微电子</div></td></tr>
|
||
<tr><td>奥普光电</td><td><a href="https://valuefrontier.cn/company?scode=002338" target="_blank" class="link link-hover link-primary">002338</a></td><td>长春光机所唯一上市平台</td><td><div class="badge badge-outline">极紫外光刻机</div> <div class="badge badge-outline">长春光机所</div></td></tr>
|
||
<tr class="bg-primary/20"><td>波长光电</td><td><a href="https://valuefrontier.cn/company?scode=301421" target="_blank" class="link link-hover link-primary">301421</a></td><td>供应非物镜镜片（照明系统、激光器光源、工台量测镜片等）</td><td><div class="badge badge-primary">极紫外光刻机</div> <div class="badge badge-primary">宇量昇</div></td></tr>
|
||
<tr class="bg-primary/20"><td>永新光学</td><td><a href="https://valuefrontier.cn/company?scode=603297" target="_blank" class="link link-hover link-primary">603297</a></td><td>供应EUV+DUVi镜片、镜头模组</td><td><div class="badge badge-primary">极紫外光刻机</div> <div class="badge badge-primary">宇量昇</div></td></tr>
|
||
<tr class="bg-primary/20"><td>美利信</td><td><a href="https://valuefrontier.cn/company?scode=301307" target="_blank" class="link link-hover link-primary">301307</a></td><td>子公司渝莱昇供应精密机械臂基座、真空腔体等核心零部件</td><td><div class="badge badge-primary">极紫外光刻机</div> <div class="badge badge-primary">宇量昇</div></td></tr>
|
||
<tr><td>苏大维格</td><td><a href="https://valuefrontier.cn/company?scode=300331" target="_blank" class="link link-hover link-primary">300331</a></td><td>公司研产销各类激光直写光刻机和纳米压印光刻机</td><td><div class="badge badge-outline">激光直写光刻机</div></td></tr>
|
||
<tr><td>芯碁微装</td><td><a href="https://valuefrontier.cn/company?scode=688630" target="_blank" class="link link-hover link-primary">688630</a></td><td>半导体功率器件设备MLF系列直写光刻机</td><td><div class="badge badge-outline">激光直写光刻机</div></td></tr>
|
||
<tr><td>福晶科技</td><td><a href="https://valuefrontier.cn/company?scode=002222" target="_blank" class="link link-hover link-primary">002222</a></td><td>BBO晶体市占率全球第一，为激光器上游材料</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光源上游</div></td></tr>
|
||
<tr><td>茂莱光学</td><td><a href="https://valuefrontier.cn/company?scode=688502" target="_blank" class="link link-hover link-primary">688502</a></td><td>精密光学器件供货上海微电子</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学系统</div></td></tr>
|
||
<tr><td>永新光学</td><td><a href="https://valuefrontier.cn/company?scode=603297" target="_blank" class="link link-hover link-primary">603297</a></td><td>光刻机镜头可应用于PCB光刻设备</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学系统</div></td></tr>
|
||
<tr><td>波长光电</td><td><a href="https://valuefrontier.cn/company?scode=301421" target="_blank" class="link link-hover link-primary">301421</a></td><td>光刻机平行光源系统</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学系统</div></td></tr>
|
||
<tr><td>福光股份</td><td><a href="https://valuefrontier.cn/company?scode=688010" target="_blank" class="link link-hover link-primary">688010</a></td><td>为高端装备（如光刻机）等领域提供高精密的光学镜头和光学系统</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学系统</div></td></tr>
|
||
<tr><td>联合化学</td><td><a href="https://valuefrontier.cn/company?scode=301209" target="_blank" class="link link-hover link-primary">301209</a></td><td>参股公司卓光芮的全资子公司罡景高端光学系统（物镜及照明系统）应用于前道KrF和iline光刻机，预计25年Q4开始交付</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学系统</div></td></tr>
|
||
<tr><td>赛微电子</td><td><a href="https://valuefrontier.cn/company?scode=300456" target="_blank" class="link link-hover link-primary">300456</a></td><td>光刻机厂商的MEMS透镜部件供应商</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>炬光科技</td><td><a href="https://valuefrontier.cn/company?scode=688167" target="_blank" class="link link-hover link-primary">688167</a></td><td>提供光刻机曝光系统里面核心元器件光场匀化器；公司收购的瑞士公司为ASML供应用于其光刻制程设备的微透镜阵列</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>苏大维格</td><td><a href="https://valuefrontier.cn/company?scode=300331" target="_blank" class="link link-hover link-primary">300331</a></td><td>曾向上海微电子供货半导体领域投影式光刻机用的定位光栅部件</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>腾景科技</td><td><a href="https://valuefrontier.cn/company?scode=688195" target="_blank" class="link link-hover link-primary">688195</a></td><td>多波段合分束器已进入微电子供应链</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>晶方科技</td><td><a href="https://valuefrontier.cn/company?scode=603005" target="_blank" class="link link-hover link-primary">603005</a></td><td>子公司向ASML供货光路零部件</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>京华激光</td><td><a href="https://valuefrontier.cn/company?scode=603607" target="_blank" class="link link-hover link-primary">603607</a></td><td>控股美国公司从事光学制版用光刻机的研发工作，不具备改进升级为芯片光刻机可能</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>锐科激光</td><td><a href="https://valuefrontier.cn/company?scode=300747" target="_blank" class="link link-hover link-primary">300747</a></td><td>公司在售的深紫外激光器为波长213nm的深紫外激光器，可主要应用于DUV激光检测、半导体光刻、FBG刻写、光谱分析等</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">光学器件</div></td></tr>
|
||
<tr><td>江丰电子</td><td><a href="https://valuefrontier.cn/company?scode=300666" target="_blank" class="link link-hover link-primary">300666</a></td><td>突破静电吸盘（超洁净晶圆片承载体，用于光刻机）技术瓶颈</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">静电吸盘</div></td></tr>
|
||
<tr><td>宝光股份</td><td><a href="https://valuefrontier.cn/company?scode=600379" target="_blank" class="link link-hover link-primary">600379</a></td><td>GKJ金属化陶瓷真空腔体已供应新凯来</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">真空腔体</div></td></tr>
|
||
<tr><td>中光防雷</td><td><a href="https://valuefrontier.cn/company?scode=300414" target="_blank" class="link link-hover link-primary">300414</a></td><td>高性能超大通流T1ACSPD（浪涌保护器），已在样品阶段</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">防雷产品</div></td></tr>
|
||
<tr><td>电科数字</td><td><a href="https://valuefrontier.cn/company?scode=600850" target="_blank" class="link link-hover link-primary">600850</a></td><td>子公司可供货光刻机控制器</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">控制器</div></td></tr>
|
||
<tr><td>富创精密</td><td><a href="https://valuefrontier.cn/company?scode=688409" target="_blank" class="link link-hover link-primary">688409</a></td><td>半导体零部件营收占比88.61%</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">其他零部件</div></td></tr>
|
||
<tr><td>新莱应材</td><td><a href="https://valuefrontier.cn/company?scode=300260" target="_blank" class="link link-hover link-primary">300260</a></td><td>半导体零部件营收占比30.21%</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">其他零部件</div></td></tr>
|
||
<tr><td>华亚智能</td><td><a href="https://valuefrontier.cn/company?scode=003043" target="_blank" class="link link-hover link-primary">003043</a></td><td>光刻机设备精密金属结构件</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">其他零部件</div></td></tr>
|
||
<tr><td>百傲化学</td><td><a href="https://valuefrontier.cn/company?scode=603360" target="_blank" class="link link-hover link-primary">603360</a></td><td>参股企业芯慧联芯自研的首台D2W混合键合设备和W2W混合键合设备，可通过3D化IC技术弥补光刻机制程的不足</td><td><div class="badge badge-outline">部件</div> <div class="badge badge-outline">其他零部件</div></td></tr>
|
||
<tr><td>汇成真空</td><td><a href="https://valuefrontier.cn/company?scode=301392" target="_blank" class="link link-hover link-primary">301392</a></td><td>光刻掩膜版镀膜设备</td><td><div class="badge badge-outline">镀膜设备</div></td></tr>
|
||
<tr><td>蓝英装备</td><td><a href="https://valuefrontier.cn/company?scode=300293" target="_blank" class="link link-hover link-primary">300293</a></td><td>为ASML提供精密清洗解决方案</td><td><div class="badge badge-outline">洁净、清洗设备</div></td></tr>
|
||
<tr><td>金力泰</td><td>-</td><td>子公司曾为上海微电子光刻机设备零部件的表面处理供应商</td><td><div class="badge badge-outline">洁净、清洗设备</div></td></tr>
|
||
<tr><td>安达智能</td><td><a href="https://valuefrontier.cn/company?scode=688125" target="_blank" class="link link-hover link-primary">688125</a></td><td>控股子公司安动半导体主要产品包括：微波去胶机、射频去胶机、等离子清洗机等</td><td><div class="badge badge-outline">洁净、清洗设备</div></td></tr>
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<tr><td>美埃科技</td><td><a href="https://valuefrontier.cn/company?scode=688376" target="_blank" class="link link-hover link-primary">688376</a></td><td>公司为上海微电子提供EFU（超薄型设备端自带风机过滤机组）及ULPA（超高效过滤器）等产品</td><td><div class="badge badge-outline">洁净、清洗设备</div></td></tr>
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<tr><td>同飞股份</td><td><a href="https://valuefrontier.cn/company?scode=300990" target="_blank" class="link link-hover link-primary">300990</a></td><td>液体恒温设备应用于光刻机</td><td><div class="badge badge-outline">温控</div></td></tr>
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<tr><td>海立股份</td><td><a href="https://valuefrontier.cn/company?scode=600619" target="_blank" class="link link-hover link-primary">600619</a></td><td>子公司海立特冷有销售光刻机用冷却系统</td><td><div class="badge badge-outline">温控</div></td></tr>
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<tr><td>东方嘉盛</td><td><a href="https://valuefrontier.cn/company?scode=002889" target="_blank" class="link link-hover link-primary">002889</a></td><td>建设光刻机寄售维修保税仓库</td><td><div class="badge badge-outline">保税仓库</div></td></tr>
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